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Paper
Oxidation mechanism of LaTiO3.5 thin films
Abstract
LaTiO3.5 is a layered compound made up of four LaTiO3 units: two regular perovskite units stacked between two distorted units that share an additional oxygen layer. In a single-crystalline thin film the (100) plane can be aligned parallel to the substrate surface, i.e., the additional oxygen layers are inserted parallel to the substrate surface. A detailed structural characterization reveals planar defects originating from substrate surface steps. These results, in combination with the in situ reflection high-energy electron-diffraction observations, suggest an oxidation mechanism using such antiphase boundaries as oxidation paths. © 2001 The American Physical Society.