Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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We discuss a generalization of the *-product in kneading theory to maps with an arbitrary finite number of turning points. This is based on an investigation of the factorization of permutations into products of permutations with some special properties relevant for dynamics on the unit interval.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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