Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
No abstract available.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences
Charles A Micchelli
Journal of Approximation Theory
Paul J. Steinhardt, P. Chaudhari
Journal of Computational Physics