Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A piezoelectric laminate theory that uses the piezoelectric phenomenon to effect distributed control and sensing of structural vibration of a flexible plate has been used to develop a class of distributed sensor/actuators, that of modal sensors/actuators. The one-dimensional modal sensors/actuator equations are first derived theoretically and then examined experimentally. These modal equations indicate that distributed piezoelectric sensors/actuators can be adopted to measure/excite specific modes of one-dimensional plates and beams. If constructed correctly, actuator/observer spillover will not be present in systems adopting these types of sensors/actuators. A mode 1 and a mode 2 sensor for a one-dimensional cantilever plate were constructed and tested to examine the applicability of the modal sensors/actuators. A modal coordinate analyzer which allows us to measure any specific modal coordinate on-line real-time is proposed. Finally, a way to create a special two-dimensional modal sensor is presented. © 1990 by ASME.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.V. Harzer, B. Hillebrands, et al.
Journal of Magnetism and Magnetic Materials
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989