Micron-sized mechanical oscillators created by 3D two-photon polymerization: Towards a mechanical logic device

Abstract

The goal of this project is to explore the possibilities of fabricating mechanical logic devices. A macroscopic model shows the idea and the feasibility of this concept. Two-photon polymerization is chosen to fabricate the required complex three-dimensional devices on a length scale of less than 100 μm. The writing process is characterized by evaluating test structures written by single laser lines. Complex MEMS resonators were fabricated and electrodes for actuation and sensing implemented. A first concept and fabrication of a MEMS mechanical mixer are shown. © 2006 Elsevier B.V.