Paper

01 Jan 1979

MA-4 the Evolution of MOS Technology Toward VLSI

View publication

Abstract

No abstract available.

Related

Conference paper

An experimental high-density memory array fabricated with electron beam

Conference paper

High-performance Si_1-xGe_x channel on insulator trigate PFETs featuring an implant-free process and aggressively-scaled fin and gate dimensions

Conference paper

FULLY SEALED HALF-MICROMETER NMOS TECHNOLOGY USING DIRECT-WIRE E-BEAM LITHOGRAPHY.

Paper

A hardened field insulator

View all publications