Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Finite impulse response lowpass filters with prescribed number of zeros at ω = π and either prescribed group delay flatness or prescribed amplitude flatness and linear phase are designed by minimizing a squared error. A simple orthogonal projection of least squared error filters (that are often available in closed form) onto a linear subspace determined via Thiran filters (for group delay flatness) and via Herrmann filters (for amplitude flatness) gives the desired filters.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences
Tong Zhang, G.H. Golub, et al.
Linear Algebra and Its Applications