Heng Cao, Haifeng Xi, et al.
WSC 2003
Heng Cao, Haifeng Xi, et al.
WSC 2003
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis