Isotropic treatment of EMF effects in advanced photomasks
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
A system of two-dimensional thermal equations of motion for anisotropic thin plates is obtained from the non-linear three-dimensional oscillation theory of finite elasticity, by using the method based on expansion of the displacement functions in terms of thickness coordinates and the variational method of Kirchhoff. Non-linearity, based on geometric considerations is expressed by taking into account the angles of rotation in the definition of strain tensor, while physical linearity is expressed by using Duhamel's law of anisotropic thermoelasticity generalized to large deformations. © 1966.
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
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SPIE Medical Imaging 1994
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
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SCC 2007