Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
No abstract available.
J. LaRue, C. Ting
Proceedings of SPIE 1989
A.R. Conn, Nick Gould, et al.
Mathematics of Computation
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007