Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The electron beam irradiation of polyperfluorinated ethers are investigated. Main-chain scissioning is the predominant effect, inducing a weight loss in the bulk materials caused by evolution of small gas molecules such as COF2 and CF4. The G values for main-chain scissioning, mass loss, and gas evolution are determined from experiment and correlated to structural differences. From these results we conclude that unbranched polyperfluoroethers degrade more efficiently and produce more COF2 than branched polymers when the monomer units contain −CF2−CF2−O− and/or −CF2O− in the main chain. With a pendant perfluoromethyl, −CF(CF3)−CF2−O−, or an additional carbon atom in the main-chain monomer unit, −CF2−CF2−CF2−O−, the electron beam induced degradation is comparatively less efficient; in the branched polymers, CF4 evolution competes with COF2 formation. © 1993, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Hiroshi Ito, Reinhold Schwalm
JES
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films