Conference paper
Low-k BEOL mechanical modeling
Xiao Hu Liu, Michael W. Lane, et al.
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It has been demonstrated that, in those instances where electromigration-induced mass transport is dominated by interfacial diffusion, the adhesion at the interface where mass transport is primarily taking place is related to the electromigration flux. Furthermore, it is shown that the cohesive energy of the interface is directly related to the activation energy for diffusion. © 2005 IEEE.
Xiao Hu Liu, Michael W. Lane, et al.
ADMETA 2004
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