Conference paper
LPCVD IN-SITU ARSENIC DOPED POLYSILICON FOR VLSI APPLICATIONS.
M. Arienzo, A.C. Megdanis, et al.
IEDM 1984
Experiments were performed on n+-p-n and p+-n+-p transistors to examine the effect of boron impurity compensation on the hole current injected into the heavily arsenic-doped n-type silicon. The result shows that the impurity compensation significantly enhances the hole current only at low temperature, and has little effect at room or higher temperatures. Copyright © 1980 by The Institute of Electrical and Electronics Engineers, Inc.
M. Arienzo, A.C. Megdanis, et al.
IEDM 1984
Alwin E. Michel
ESSDERC 1987
L. Thon, G.P. Coleman, et al.
LPED 1996
W.N. Hammer, Alwin E. Michel
Journal of Applied Physics