Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
The scanning tunneling microscope (STM) is used to study the disordering of the Ge(111)c(2 × 8) surface, at temperatures in the range 150-350°C. The disorder occurs by the diffusion of surface adatoms in the 〈011〉 directions. Disordered regions form at domain boundaries of the c(2 × 8) structure, and grow in size continuously with temperature until the entire surface becomes disordered at about 300°C. This order-disorder transition is identified as an example of premelting in two dimensions, i.e., edge melting. Analysis of relatively large STM images is used to obtain statistics for this continuous phase transition. © 1993.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Michael E. Henderson
International Journal of Bifurcation and Chaos in Applied Sciences and Engineering
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences