Conference paper
Cleans for Al vias in a 0.175 μm Dual Damascene Process
J.P. Gambino, L. Clevenger, et al.
IITC 1999
We show for the first time that electron-energy-loss measurements of atomic absorption are different from the soft-x-ray photoyield data in the region influenced by the core exciton. We suggest that the core-exciton envelope function is influenced by the swift electron and its associated charge-density wake. Solving Schrödingers equation for a model transition potential including the swift electron, we find that the observed differences for SiOx, diamond, and Si can be reproduced. Spectra from aluminum are included as a comparison when the exciton is absent. © 1991 The American Physical Society.
J.P. Gambino, L. Clevenger, et al.
IITC 1999
P.E. Batson
Microscopy and Microanalysis
P.E. Batson
Surface Science
T. Ando, M.M. Frank, et al.
IEDM 2009