Backscattered electron imaging in the scanning electron microscope: The use of either: (A) high incident energy or (b) an array detector

L. Gignac, K.P. Rodbell, et al.

MRS Spring Meeting 1999

J.M.E. Harper, C. Cabral Jr., et al.

MRS Spring Meeting 1999

C.-K. Hu, L. Gignac, et al.

IITC 2002

Y.-H. Kim, C. Cabral Jr., et al.

IEDM 2005