Conference paperControl of sidewall roughness formation in through-silicon via etch at non-cryogenic temperatures
PaperAutomated, Three-dimensional and Sub-micron Accurate Ablation-volume Determination by Inverse Molding and X-ray Computed Tomography
PaperThe Role of Methyl Groups in the Early Stage of Thermal Polymerization of Polycyclic Aromatic Hydrocarbons Revealed by Molecular Imaging
