Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
Inequality constrained minimization problems are often solved byconsidering a sequence of parameterized barrier functions. Each barrierfunction is approximately minimized and the relevant parameterssubsequently adjusted.It is common for the estimated solution to one barrier function problemto be used as a starting estimate for the next. However, this hasunfortunate repercussions for the standard Newton-like methods applied tothe barrier subproblem.In this note, we consider a class of alternative Newton methods whichattempt to avoid such difficulties.Such schemes have already proved of use in the Harwell Subroutine Libraryquadratic programming codes {\tt VE14} and {\tt VE19}. © 1994, Springer-Verlag Berlin Heidelberg. All rights reserved.
J. LaRue, C. Ting
Proceedings of SPIE 1989
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
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Journal of Global Optimization
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SPIE Advanced Lithography 1998