S.J. Koester, K.L. Saenger, et al.
IEEE Electron Device Letters
The appearance of stationary stripes in a voltage contrast SEM image of a circuit, generally known as voltage coding, is a commonly used technique for tracing circuit lines for failure analysis and for locating nodes for waveform measurements. Maintaining a steady striped image requires synchronizing a pattern generator to the SEM raster scan. A circuit is described which can be attached to any SEM to perform this synchronization, and which has a number of features which extend the usefulness of voltage coding. Copyright © 1990 Foundation for Advances in Medicine and Science, Inc.
S.J. Koester, K.L. Saenger, et al.
IEEE Electron Device Letters
M. Soyuer, J.N. Burghartz, et al.
ISCAS 1996
M. Soyuer, J.N. Burghartz, et al.
BCTM 1996
B.H. Lee, A.C. Mocuta, et al.
IEDM 2002