Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results at Journal of Micro/Nanolithography, MEMS, and MOEMS

Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
- - Timothy A. Brunner
  - Vinayan C. Menon
  - et al.
- 2013
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry targets
- - Alok Vaid
  - Matthew Sendelbach
  - et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Predicting substrate-induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Combinatorial overlay control for double patterning
- - Christopher P. Ausschnitt
  - Scott D. Halle
- 2009
- Journal of Micro/Nanolithography, MEMS, and MOEMS