Publications

2 results at ASMC 2025

Wafer Defect Root Cause Analysis with Partial Trajectory Regression
- - Kohei Miyaguchi
  - Masao Joko
  - et al.
- 2025
- ASMC 2025
Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis
- - Kohei Miyaguchi
  - Masao Joko
  - et al.
- 2025
- ASMC 2025