Film crystallographic texture and substrate surface roughness in layered aluminum metallization
- K.P. Rodbell
- V. Svilan
- et al.
- 1996
- MRS Spring Meeting 1996
Publications
14 results at MRS Spring Meeting 1996
0.1 μm technology and BEOL
- T.H. Ning
- 1996
- MRS Spring Meeting 1996
Effect of contact implants on the patterning of tungsten damascene interconnects
- J.P. Gambino
- M.A. Jaso
- et al.
- 1996
- MRS Spring Meeting 1996
Continuous processing of sheet-like materials by microwave energy
- D.A. Lewis
- S.J. Whitehair
- et al.
- 1996
- MRS Spring Meeting 1996
Local and global stress distributions in BEOL metallization
- I.C. Noyan
- E. Liniger
- et al.
- 1996
- MRS Spring Meeting 1996
Nanoporous polyimide films from polyimide-aliphatic polyester or polyimide-aliphatic polycarbonate copolymers
- K.R. Carter
- J.L. Hedrick
- et al.
- 1996
- MRS Spring Meeting 1996
Microporous crosslinked elastomers
- J.L. Hedrick
- S.A. Srinivasan
- et al.
- 1996
- MRS Spring Meeting 1996
Phase formation in Cu(Sn) alloy thin films
- L. Clevenger
- B. Arcot
- et al.
- 1996
- MRS Spring Meeting 1996
Electromigration and diffusion in pure Cu and Cu(Sn) alloys
- C.-K. Hu
- K.L. Lee
- et al.
- 1996
- MRS Spring Meeting 1996
Electromigration and diffusion in pure Cu and Cu(Sn) alloys
- C.-K. Hu
- K.L. Lee
- et al.
- 1996
- MRS Spring Meeting 1996