Three-dimensional imaging of nano-voids in copper interconnects using incoherent bright field (IBF) tomography
- Peter Ercius
- David A. Muller
- et al.
- 2006
- AMC 2006
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.