Publications

14330 results for Physical Sciences

Low-n absorber EUV masks: mask manufacturing assessment through process characterization and optimization with early look at EUV Low-NA and High-NA imaging performance
- - Henry Kamberian
  - Jed Rankin
  - et al.
- 2024
- SPIE Photomask Technology + EUV Lithography 2024
Controlled single-electron transfer enables time-resolved excited-state spectroscopy of individual molecules
- - Lisanne Sellies
  - Jakob Eckrich
  - et al.
- 2024
- Nature Nanotechnology
Simultaneous Co-localized TiO₂ Etching and W Atomic Layer Deposition Using WF₆ as a Dual-Functional Reactant
- - Hannah R. M. Margavio
  - Noel Arellano
  - et al.
- 2024
- Chemistry of Materials
pyMSER─An Open-Source Library for Automatic Equilibration Detection in Molecular Simulations
- - Felipe L. Oliveira
  - Binquan Luan
  - et al.
- 2024
- JCTC
Leveraging Foundational AI Models for Polymer Design
- - Nathaniel Park
  - Tim Erdmann
  - et al.
- 2024
- Polycondensation 2024
Evaluation of Cu surface diffusion on different metal liner materials for Cu reflow applications
- - O. van der Straten
  - L.W. Wangoh
- 2024
- Journal of Materials Research
Thermodynamics of multicolored loop models in three dimensions
- - Soumya Kanti Ganguly
  - Sumanta Mukherjee
  - et al.
- 2024
- Physical Review E
In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
- - Yousra Traouli
  - Ufuk Kilic
  - et al.
- 2024
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Percolation in a three-dimensional nonsymmetric multicolor loop model
- - Soumya Kanti Ganguly
  - Sumanta Mukherjee
  - et al.
- 2024
- Physical Review E
Tunable and Mass-fabrication Compatible All-dielectric Metasurfaces for Mobile Sensing Applications
- - Giulia Prone
  - Dominik Scherrer
  - et al.
- 2024
- Swiss Phot. Ind. Symp. on Phot. Sens. 2024