Preparation and Some Properties of Chemically Vapor-Deposited Si-Rich SiO and Si3N4 Films
- D.W. Dong
- E.A. Irene
- et al.
- 2019
- JES
Publications
509 results at JES
On the Nature of Fixed Oxide Charge
- S.I. Raider
- A. Berman
- 2019
- JES
The Formation of SiO2 in an RF Generated Oxygen Plasma: I. The Pressure Range Below 10 mTorr
- A. Ray
- A. Reisman
- 2019
- JES
Influence of the Growth Conditions of Al2O3 Passivating Layers on the Corrosion of Aluminum Films in Water
- J. Grimblot
- J.M. Eldridge
- 2019
- JES
Radiochemical Analysis of β-Al2O3, and the Preparation of Na-22 Tagged Monocrystals
- L.M. Foster
- J.E. Scardefield
- 2019
- JES
The Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
- A. Reisman
- M. Berkenblit
- et al.
- 2019
- JES
Epitaxial Relations in Films of Cr, Pt, and CrPt on Sapphire
- J.E.E. Baglin
- F.M. d'Heurle
- 2019
- JES
Electron Beam-Induced Reactions of Orthonaphthoquinone-Diazide-Sulfonyl Derivatives in Phenolic-Type Resins
- Hiroyuki Hiraoka
- Adolfo R. Gutierrez
- 2019
- JES
Al Coverage of Surface Steps at SiO2 Insulated Polycrystalline Si Boundaries: Al Evaporation in Vacuum and Low Pressure Ar
- V.J. Silvestri
- V.L. Rideout
- et al.
- 2019
- JES
The Fabrication of High Precision Nozzles by the Anisotropic Etching of (100) Silicon
- E. Bassous
- E.F. Baran
- 2019
- JES