Publications

26309 results for Science

Advanced EUV CAR small molecule compounds design and its impact to etch performance
- - Yinjie Cen
  - Jong Keun Park
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Disruptive non-fluorinated photoacid generators using computational chemistry and library design
- - P. Labeaume
  - K. Hernandez
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Novel spin-on overcoat materials for EUV photoresist enhancement
- - Xisen Hou
  - Yinjie Cen
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Impact of increasing EUV absorption of CAR polymers on lithographic performance
- - Yinjie Cen
  - Emad Aqad
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Identifying trends in photoresist polymer properties to improve line and space defects Considerations to Improve Microbridge Defectivity in EUV Chemically Amplified Photoresists
- - Benjamin D. Rafael-Naab
  - Jong Keun Park
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Efficient Syndrome Decoder for Heavy Hexagonal QECC via Machine Learning
- - Debasmita Bhoumik
  - Ritajit Majumdar
  - et al.
- 2024
- ACM TQC
A Unifying Framework for Incompleteness, Inconsistency, and Uncertainty in Databases
- - Benny Kimelfeld
  - Phokion G. Kolaitis
- 2024
- Communications of the ACM
Chemical Space Analysis and Property Prediction for Carbon Capture Amine molecules
- - James Mcdonagh
  - Stamatia Zavitsanou
  - et al.
- 2024
- Digital Discovery
Chemical space analysis and property prediction for carbon capture solvent molecules
- - James L. McDonagh
  - Stamatia Zavitsanou
  - et al.
- 2024
- Digital Discovery
Quantum Complexity of the Kronecker Coefficients
- - Sergey Bravyi
  - Anirban Chowdhury
  - et al.
- 2024
- PRX Quantum