Publications

509 results at JES

Effect of Lubricant Environments on Saw Damage in Si Wafers
- - T.S. Kuan
  - K.K. Shih
  - et al.
- 2019
- JES
AZ1350J as a Deep-U.V. Mask Material
- - B.J. Lin
- 2019
- JES
Single Crystal Silicon Films on Amorphous Insulators: Growth by Lateral Nucleated Epitaxy Using Scanning Laser and Electron Beams and Evaluation by Electron Backscattering Contrast
- - T.O. Sedgwick
  - R.H. Geiss
  - et al.
- 2019
- JES
Parameter Dependence of RIE Induced Radiation Damage in Silicon Dioxide
- - L.M. Ephrarh
  - D.J. Dimaria
  - et al.
- 2019
- JES
TiO2 Antireflection Coatings by a Low Temperature Spray Process
- - H.J. Hovel
- 2019
- JES
Effect of V2O3 Addition on the Thermoluminescence and Phosphorescence of Tb-Activated Garnet Phosphors
- - Takeshi Takamori
  - Stephen Fine
  - et al.
- 2019
- JES
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- - E.A. Irene
  - N.J. Chou
  - et al.
- 2019
- JES
Effects of Several Parameters on the Corrosion Rates of Al Conductors in Integrated Circuits
- - Israel Lerner
  - Jerome M. Eldridge
- 2019
- JES
I. Interaction of Al Films with O₂ at Low Pressures
- - Jean Grimblot
  - Jerome M. Eldridge
- 2019
- JES
Control of Plasma Etch Profiles with Plasma Sheath Electric Field and RF Power Density
- - R.S. Horwath
- 2019
- JES