Publications

310 results at Thin Solid Films

Supercritical CO₂/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
- - A.A. Lubguban
  - J.A. Lubguban
  - et al.
- 2008
- Thin Solid Films
Plasma ash processing solutions for advanced interconnect technology
- - N. Fuller
  - M.A. Worsley
  - et al.
- 2008
- Thin Solid Films
Chemical and structural modifications in a 193-nm photoresist after low-k dry etch
- - E. Kesters
  - M. Claes
  - et al.
- 2008
- Thin Solid Films
Interfacial microstructure of NiSi_x/HfO₂/SiO_x/Si gate stacks
- - M. Gribelyuk
  - C. Cabral Jr.
  - et al.
- 2007
- Thin Solid Films
Nanoporous organosilicate films as antireflection coatings
- - Koushik Biswas
  - Shubhra Gangopadhyay
  - et al.
- 2006
- Thin Solid Films
Effect of oxygen at the Cu-SiC_xN_y interface on electromigration performance of interconnect structures
- - E. Liniger
  - C. Dziobkowski
- 2006
- Thin Solid Films
Electromigration Cu mass flow in Cu interconnections
- - C.-K. Hu
  - D. Canaperi
  - et al.
- 2006
- Thin Solid Films
Underlayer effects on texture evolution in copper films
- - C.E. Murray
  - K.P. Rodbell
  - et al.
- 2006
- Thin Solid Films
CoSi₂ formation in the presence of Ti, Ta or W
- - C. Detavernier
  - C. Lavoie
  - et al.
- 2004
- Thin Solid Films
Evolution of microstructure in Ti-Ta bilayer thin films on polycrystalline-Si and Si(001)
- - A.S. Özcan
  - K.F. Ludwig Jr.
  - et al.
- 2004
- Thin Solid Films