Publications

3543 results for Mathematical Sciences

Track based techniques to improve high-resolution EUV patterning defectivity
- - Naoki Shibata
  - Lior Huli
  - et al.
- 2018
- EUVL 2018
Streaming algorithms for estimating the matching size in planar graphs and beyond
- - Hossein Esfandiari
  - Mohammadtaghi Hajiaghayi
  - et al.
- 2018
- ACM Transactions on Algorithms
Heuristic policies for stochastic knapsack problem with time-varying random demand
- - Yingdong Lu
- 2018
- Appl Stochastic Models Bus Indus
Calibrating Noise to Variance in Adaptive Data Analysis
- - Vitaly Feldman
  - Thomas Steinke
- 2018
- arXiv
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- - Chi-Chun Liu
  - Yann Mignot
  - et al.
- 2018
- SPIE Advanced Lithography 2018
Bounded-Velocity Stochastic Control for Dynamic Resource Allocation
- - Xuefeng Gao
  - Yingdong Lu
  - et al.
- 2018
- arXiv
Control Localization in Networks of Dynamical Systems Connected via a Weighted Tree
- - Ravindra Bapat
  - Chai Wah Wu
- 2017
- IEEE Transactions On SMC: Systems
Coater/developer based techniques to improve high-resolution EUV patterning defectivity
- - Koichi Hontake
  - Lior Huli
  - et al.
- 2017
- SPIE Photomask Technology + EUV Lithography 2017
Multi Level Clustering Technique Leveraging Expert Insight
- - Sudhanshu Singh
  - Ritwik Chaudhuri
  - et al.
- 2017
- JSM 2017
Generalization for Adaptively-chosen Estimators via Stable Median
- - Vitaly Feldman
  - Thomas Steinke
- 2017
- COLT 2017