Publications

509 results at JES

X-Ray Damage Considerations in MOSFET Devices
- - J.R. Maldonado
  - S.S. Iyer
- 2019
- JES
Electroactive Properties of Polyaromatic Molecules
- - Joachim Bargon
  - A. Diaz
- 2019
- JES
Investigation of Reactive-Ion-Etching-Related Fluorocarbon Film Deposition onto Silicon and a New Method for Surface Residue Removal
- - G.S. Oehrlein
  - J.G. Clabes
  - et al.
- 2019
- JES
The Polycrystalline-Si Contact to GaAs
- - P.D. Kirchner
  - J.M. Woodall
  - et al.
- 2019
- JES
Feature-Size Dependence of Etch Rate in Reactive Ion Etching
- - Young H. Lee
  - Zhen H. Zhou
- 2019
- JES
Combined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF₄/O₂ Etching of Silicon
- - M. Dalvie
  - K.F. Jensen
- 2019
- JES
Maskless Laser Patterning for Gold Plating of Microelectronic Materials
- - R.J. von Gutfeld
  - M.H. Gelchinski
  - et al.
- 2019
- JES
PtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- - H.-C.W. Huang
  - B. Cunningham
  - et al.
- 2019
- JES
Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation
- - E. Tierney
- 2019
- JES
low Temperature Silicon Epitaxy by Hot Wall Ultrahigh Vacuum/Low Pressure Chemical Vapor Deposition Techniques: Surface Optimization
- - B.S. Meyerson
  - E. Ganin
  - et al.
- 2019
- JES