Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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12 results at Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C₄ F ₈ - And CF₄ -based discharges
- - S. Engelmann
  - R. Bruce
  - et al.
- 2009
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Carbon doping of GaP, GalnP, and AlinP in metalorganic molecular beam epitaxy using methyl and ethyl precursors
- - T.J. De Lyon
  - J. Woodall
  - et al.
- 1991
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics