The Semiconductor Supply Chain in an Era of Low GWP and/or PFAS-Free Gas Chemistries
- 2025
- SPIE Advanced Lithography + Patterning 2025
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- SPIE Advanced Lithography + Patterning 2025
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17 results at SPIE Advanced Lithography + Patterning 2025
Wet clean oxidation for optimal line width and LER
- Steven McDermott
- Keith Donegan
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Massive E-beam Metrology Characterization of Reticle Stitching Boundaries
- Genevieve Kane
- Connor Smith
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Dry Resist Characterization Towards Technology Insertion for 28-36P EUV Patterning
- Yasiel Cabrera
- Gopal Kenath
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Effect of composition uniformity in the polymer chain of EUV photoresist on lithographic performance
- Euijin Ko
- Yoorim Jang
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Quantum Computing and AI: Making it work
- 2025
- SPIE Advanced Lithography + Patterning 2025
Accelerated Discovery for a Sustainable Semiconductor Industry
- 2025
- SPIE Advanced Lithography + Patterning 2025