168 results at
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures- D.J. Wolford
- G.D. Gilliland
- et al.
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- K. Mahalingam
- N. Otsuka
- et al.
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- G. Northrop
- D.J. Wolford
- et al.
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- S. Chang
- I.M. Vitomirov
- et al.
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- J. Freeouf
- Alan C. Warren
- et al.
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- Ulf Gennser
- V.P. Kesan
- et al.
- 1991
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- J.H. Magerlein
- John M. Baker
- et al.
- 1984
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures