Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Images of a microelectronic device with the X1-SPEM, a first generation scanning photoemission microscope at the National Synchrotron Light Source
- - H. Ade
  - J. Kirz
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thermal stress-induced and electromigration-induced void-open failures in Al and Al-Cu fine lines
- - T. Kwok
  - K.K. Chan
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Deposition of (100) Au, Ag, Pd, Pt, and Fe on (100) Si using different metal seed layers
- - Chin-An Chang
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The effects of substrate bias on plasma parameters in an electron cyclotron resonance plasma reactor
- - John B.O. Caughman
  - William M. Holber
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Correlation of interface chemistry, barrier height, and step density for Al on vicinal GaAs(100) surfaces
- - S. Chang
  - I.M. Vitomirov
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Magnetization of (100) Cr/Fe/Cr and Pd/Fe/Pd structures
- - Chin-An Chang
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Formation of Cu₃Si and its catalytic effect on silicon oxidation at room temperature
- - L. Stolt
  - A. Charai
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ion-beam sputtered diamond-like carbon with densities of 2.9 g/cc
- - Jerome J. Cuomo
  - John Bruley
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Relation of thickness and some physical properties of NiFe thin films
- - R.M. Valletta
  - G. Guthmiller
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface etching and roughening in integrated processing of thermal oxides
- - M. Offenberg
  - M. liehr
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films