Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Studies of the reactive ion etching of SiGe alloys
- - G.S. Oehriein
  - G.M.W. Kroesen
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Oxygen induced adhesion degradation at metai/polyimide interface
- - Da-Yuan Shih
  - Nancy Klymko
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Gaas surface oxidation and deoxidation using electron cyclotron resonance oxygen and hydrogen plasmas
- - D.V. Podlesnik
  - M.T. Schmidt
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Stress and thermal expansion of boron-doped silicon membranes on silicon substrates
- - B.S. Berry
  - W.C. Pritchet
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Rastered laser light scattering studies during plasma processing: Particle contamination trapping phenomena
- - Gary S. Selwyn
  - J. Heidenreich
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Two-dimensional imaging of photofragments and species desorbed from surfaces: Energy and angle resolved studies
- - T.J. Chuang
  - R. Schwarzwald
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X-ray photoelectron spectroscopy of oxygen adsorbates on Al(111): Theory experiment
- - P.S. Baqus
  - F. Parmiqiani
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The effects of substrate potentials on electron cyclotron resonance plasmas
- - S.M. Rossnagel
  - S.J. Whitehair
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The polarization dependence of Bi-induced surface states on GaAs(110)
- - A.B. McLean
  - R. Ludeke
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Images of a microelectronic device with the X1-SPEM, a first generation scanning photoemission microscope at the National Synchrotron Light Source
- - H. Ade
  - J. Kirz
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films