Publications

168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Energy spread in liquid metal ion sources at low currents
- - J.C. Beckman
  - T.H.P. Chang
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Low-temperature magnetic resonance force detection
- - K. Wago
  - O. Züger
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Ionized physical vapor deposition of Cu for high aspect ratio damascene trench fill applications
- - C. Nichols
  - S.M. Rossnagel
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
High resolution electron beam lithography using ZEP-520 and KRS resists at low voltage
- - D.M. Tanenbaum
  - C.W. Lo
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Study of interface abruptness of molecular beam epitaxial GaAs/AlAs superlattices grown on GaAs (311) and (100) substrates
- - Y. Hsu
  - W.I. Wang
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Stressing and high field transport studies on device-grade SiO₂ by ballistic electron emission spectroscopy
- - R. Ludeke
  - H.J. Wen
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Correlation of UVIIHS resist chemistry to dissolution rate measurements
- - J. Thackeray
  - T.H. Fedynyshyn
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
An inquiry concerning the principles of Si 2p core-level photoemission shift assignments at the Si/SiO₂ interface
- - F.R. McFeely
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Cu metallization using a permanent magnet electron cyclotron resonance microwave plasma/sputtering hybrid system
- - S.M. Gorbatkin
  - D.B. Poker
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Design and performance analysis of a three-dimensional sample translation device used in ultrahigh vacuum scanned probe microscopy
- - R.R. Schlittler
  - J.K. Gimzewski
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures