A Three-Layer Resist System for Deep U.V. and RIEMicrolithography on Nonplanar Surfaces
- E. Bassous
- G. Pepper
- et al.
- 2019
- JES
Publications
509 results at JES
X-Ray Damage Considerations in MOSFET Devices
- J.R. Maldonado
- S.S. Iyer
- 2019
- JES
Approaches to the Design of Radiation-Sensitive Polymeric Imaging Systems with Improved Sensitivity and Resolution
- Jean M.J. Fréchet
- Theodore G. Tessier
- et al.
- 2019
- JES
Electroactive Properties of Polyaromatic Molecules
- Joachim Bargon
- A. Diaz
- 2019
- JES
Corrosion and Passivation of Fe and FeN Films
- V. Brusic
- G.S. Frankel
- et al.
- 2019
- JES
A Self-Aligned, Trilayer, A-Si:H Thin Film Transistor Prepared from Two Photomasks
- Yue Kuo
- 2019
- JES
Photoinitiated Cross-Linking and Image Formation in Thin Polymer Films Containing a Transition Metal Compound
- C. Grant Willson
- 2019
- JES
Electrochemistry of Chromium-Metalloid Alloys in Sulfuric Acid—II
- R.R. Ruf
- 2019
- JES
Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation
- E. Tierney
- 2019
- JES
PtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- H.-C.W. Huang
- B. Cunningham
- et al.
- 2019
- JES