DUV stability of carbon films for attenuated phase shift mask applications
- Alessandro Callegari
- Katherina Babich
- et al.
- 1998
- SPIE Advanced Lithography 1998
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
58 results for F. Cardone
Process damage and contamination effects for shallow Si implanted GaAs
- H. Barratte
- G. Scilla
- et al.
- 1989
- ECS Meeting 1989
Passivation of dopants in ion implanted and rapid thermally annealed GaAs in H+ plasma environment
- J.P. de Souza
- D.K. Sadana
- et al.
- 1990
- Symposium on Process Physics and Modeling in Semiconductor Technology 1990
Epitaxial Growth of GaAs with (C2H5)2GaCl and AsH3 in a Hotwall Reactor
- T.F. Kuech
- M.A. Tischler
- et al.
- 2019
- JES
Process Damage and Contamination Effects for Shallow Si Implanted GaAs
- H. Baratte
- A.J. Fleischman
- et al.
- 2019
- JES
Quantitative analysis of complex targets by proton-induced x rays
- W. Reuter
- A. Lurio
- et al.
- 2008
- Journal of Applied Physics
Epitaxial small magnetic bubble La-Sm-Lu iron garnet films grown on NdGaG substrates oriented (100) and (111)
- E.A. Giess
- R.J. Kobliska
- et al.
- 2008
- Journal of Applied Physics
LPE Growth and Composition of Magnetic EuTm‐CaGe Iron Garnet Films
- E.A. GIESS
- C.F. GUERCI
- et al.
- 2006
- JACerS
Mg in GaN: Incorporation of a volatile species at high temperatures during molecular beam epitaxy
- S. Guha
- N.A. Bojarczuk
- et al.
- 1997
- Applied Physics Letters
Defect states in strain-relaxed Si0.7Ge0.3 layers grown at low temperature
- P.M. Mooney
- L. Tilly
- et al.
- 1997
- Journal of Applied Physics