Publications

2 results for David K. Watts

Enabling scatterometry as an in-line measurement technique for 32 nm BEOL application
- - M. Golam Faruk
  - Shahin Zangooie
  - et al.
- 2011
- IEEE Trans Semicond Manuf
Evaluation of barrier CMP slurries and characterization of ULK material properties shifts due to CMP
- - Wei-Tsu Tseng
  - Dimitri Kioussis
  - et al.
- 2008
- ECS Meeting 2008