Atomic layer deposition of Al-incorporated Zn(O,S) thin films with tunable electrical properties
- Helen Hejin Park
- Ashwin Jayaraman
- et al.
- 2014
- Applied Physics Letters
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.