Publications

2 results for Shih-Tsung Chen

E-beam hot spot inspection for early detection of systematic patterning problems for a 22 nm SOI technology
- - Oliver D. Patterson
  - Deborah A. Ryan
  - et al.
- 2014
- IEEE Trans Semicond Manuf
Early detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection
- - Oliver D. Patterson
  - Deborah A. Ryan
  - et al.
- 2013
- ASMC 2013