Publications

3 results for Dan Fischer

Lithographic qualification of high-Transmission mask blank for 10nm node and beyond
- - Yongan Xu
  - Tom Faure
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Challenges of implementing contour modeling in 32nm technology
- - Daniel Fischer
  - Geng Han
  - et al.
- 2008
- SPIE Advanced Lithography 2008
OPC model data collection for 45nm technology node using automatic CD-SEM offline recipe creation
- - Daniel Fischer
  - Mohamed Talbi
  - et al.
- 2007
- SPIE Advanced Lithography 2007