Publications

2 results for Conor Thomas

Leveraging sub-E0 dose assessment methodology to improve EUV lithography cluster dose performance
- - Chris Robinson
  - Cody Murray
  - et al.
- 2020
- SPIE Advanced Lithography 2020
EUV chemically amplified resist component distribution and efficiency for stochastic defect control
- - Dario Goldfarb
  - Olivia Wang
  - et al.
- 2020
- SPIE Advanced Lithography 2020