TSV Stress Evolution Mapping using in-line Raman Spectroscopy
- Stefan Schoeche
- Daniel Schmidt
- et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
Publications
Date
Featured collections
Popular topics
6 results for Stefan Schoeche
Development of Epitaxial SiGeB as a Test Vehicle to Evaluate Source-Drain Etchout during Channel Release of Gate-all-Around Devices: Topic/category: AEPM: Advanced Equipment Processes and Materials
- M. Nasseri
- C. Durfee
- et al.
- 2024
- ASMC 2024
Broadband mid-infrared resonances in aligned carbon nanotube films
- John Andris Roberts
- Po Hsun Ho
- et al.
- 2020
- CLEO_QELS 2020
Mid-infrared Hyperbolic Plasmons in Aligned Carbon Nanotube Metamaterials
- Shang Jie Yu
- John Andris Roberts
- et al.
- 2019
- NOMA 2019
Tunable Hyperbolic Plasmons in Self-Assembled Carbon Nanotube Metamaterials
- John Andris Roberts
- Shang Jie Yu
- et al.
- 2019
- CLEO 2019
In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
- Yousra Traouli
- Ufuk Kilic
- et al.
- 2024
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films