Publications

23 results for Werner Rausch

Rapid annealing and the anomalous diffusion of ion implanted boron into silicon
- - Alwin E. Michel
  - W. Rausch
  - et al.
- 1987
- Applied Physics Letters
Implantation damage and the anomalous transient diffusion of ion-implanted boron
- - Alwin E. Michel
  - W. Rausch
  - et al.
- 1987
- Applied Physics Letters
Uniformity characterization of an RTP system
- - Jeffrey C. Gelpey
  - Paul O. Stump
  - et al.
- 1987
- Nuclear Inst. and Methods in Physics Research, B