Etching of iridium thin films in chlorine- and fluorine-based inductively coupled plasmas
- Juliano Borges
- Hongwen Yan
- et al.
- 2024
- SPIE Advanced Lithography 2024
Publications
8 results for Leonidas E. Ocola
Mapping and statistical analysis of filaments locations in amorphous HfO2 ReRAM cells
- Franco Stellari
- Ernest Y. Wu
- et al.
- 2023
- Microelectronics Reliability
Trilayer process for T -gate and Γ-gate lithography using ternary developer and proximity effect correction superposition
- Leonidas E. Ocola
- James Bucchignano
- et al.
- 2022
- Journal of Vacuum Science and Technology B
Photon Emission Microscopy of Amorphous HfO2 ReRAM Cells
- Franco Stellari
- Leonidas E. Ocola
- et al.
- 2022
- IPFA 2022
Gibbs spatial process for characterization of filament interaction in ReRAM devices via photon emission microscopy
- Ernest Wu
- Franco Stellari
- et al.
- 2022
- Applied Physics Letters
Switchable geometric frustration in an artificial-spin-ice-superconductor heterosystem
- Yong-Lei Wang
- Xiaoyu Ma
- et al.
- 2018
- Nature Nanotechnology
Fabrication of phonon-based metamaterial structures using focused ion beam patterning
- Nabil D. Bassim
- Alexander J. Giles
- et al.
- 2018
- Applied Physics Letters
Resist requirements and limitations for nanoscale electron-beam patterning
- J. Alexander Liddle
- Gregg M. Gallatin
- et al.
- 2002
- MRS Proceedings 2002