Publications

198 results for Christian Lavoie

Crystallographic texture of C54 titanium disilicide as a function of deep submicron structure geometry
- - V. Svilan
  - K.P. Rodbell
  - et al.
- 1997
- Journal of Electronic Materials
Effect of growth conditions on surface roughening of relaxed InGaAs on GaAs
- - T. Pinnington
  - C. Lavoie
  - et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
In situ detection of misfit dislocations by light scattering
- - K.L. Kavanagh
  - R.S. Goldman
  - et al.
- 1997
- Journal of Crystal Growth
In situ TEM analysis of TiSi₂ C49-C54 transformations during annealing
- - L. Gignac
  - V. Svilan
  - et al.
- 1996
- MRS Fall Meeting 1996
Formation of a crystalline metal-rich suicide in thin film titanium/silicon reactions
- - L. Clevenger
  - C. Cabral Jr.
  - et al.
- 1996
- Thin Solid Films
Dependence of crystallographic texture of C54 TiSi₂ on thickness and linewidth in submicron CMOS structures
- - V. Svilan
  - K.P. Rodbell
  - et al.
- 1996
- MRS Spring Meeting 1996
In situ analysis of the formation of thin TiSi₂ (<50 nm) contacts in submicron CMOS structures during rapid thermal annealing
- - L. Clevenger
  - C. Cabral Jr.
  - et al.
- 1995
- MRS Fall Meeting 1995
Light scattering measurement of surface topography during formation of titanium silicide
- - C. Lavoie
  - C. Cabral Jr.
  - et al.
- 1995
- MRS Fall Meeting 1995