Publications

3 results for Sylvie Eckert

Advanced EUV CAR small molecule compounds design and its impact to etch performance
- - Yinjie Cen
  - Jong Keun Park
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Identifying trends in photoresist polymer properties to improve line and space defects Considerations to Improve Microbridge Defectivity in EUV Chemically Amplified Photoresists
- - Benjamin D. Rafael-Naab
  - Jong Keun Park
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Impact of increasing EUV absorption of CAR polymers on lithographic performance
- - Yinjie Cen
  - Emad Aqad
  - et al.
- 2024
- SPIE Advanced Lithography 2024