Publications

2 results for Carl Stahlhammer

Evaluation of the defense advanced lithography program (DALP) X-ray lithography aligner
- - A.C. Chen
  - A. Flamholz
  - et al.
- 1997
- Microlithography 1997
X-ray lithography for ≤100 nm ground rules in complex patterns
- - Scott Hector
  - Victor Pol
  - et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures