Challenges in FEOL logic device integration for 32 nm technology node and beyond
- Dae-Gyu Park
- M. Chudzik
- et al.
- 2007
- ECS Meeting 2007
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.